Nova Measuring Instruments Introduces The NovaScan 3060, the
Fastest Integrated Metrology System available for 300mm CMP
Processes

New System Enables Advanced Dielectric and Conductor Thickness
Measurements and Control for Both In-Air and In-Water 300mm CMP
Applications

Rehovoth, Israel, December 2, 2002 - Nova Measuring Instruments Ltd. (NASDAQ: NVMI), the market leader in integrated measurement and process control for the semiconductor industry, announced today the launch of the NovaScan 3060, the fastest Integrated Metrology system on the market for high-end 300mm chemical mechanical polishing (CMP) applications.

The NovaScan 3060 has an overall measurement time of 13 seconds per wafer for 13 sites, compatible with all high-throughput polishers, enabling measurement and mapping of all wafers both pre- and post-polish without affecting the polisher's throughput.

Nova is the only Integrated Metrology provider to offer both wet and dry integrations. This allows customers to choose the best alternative, based on both BKM (Best-Known Method) as well as price and performance considerations. The NovaScan 3060 utilizes UV spectrophotometry to accurately measure and map the most advanced applications in the semiconductor industry down to the 0.09um technology. The NovaScan 3060 is a natural extension of the existing NovaScan series, enabling semiconductor manufacturers to easily upgrade production lines from 200mm to 300mm, and to continue successfully implementing wafer to wafer closed loop control (CLC). In addition to the high speed and advanced technology, the NovaScan 3060 works with new operating software, which supports the unit's new capabilities without sacrificing ease of use. The NovaScan 3060's patented, non-contact in-air and in-water thickness measurement technology eliminates operator handling or intervention, and eliminates the need for external verification after cleaning and drying.

Commenting on the announcement, Mr. Rani Kipper, Manager of Nova's Film Division said, "We at Nova are committed to providing our customers with the most advanced integrated process control solutions for a wide range of applications throughout the manufacturing line. In today's environment, as new polishers become increasingly faster, it's only logical that integrated metrology within the polisher will become faster in order to keep up. Being the fastest and most advanced system on the market, the NovaScan 3060 provides a logical upgrade path for semiconductor manufacturers. Operating in either air or water, this advanced integrated platform has been designed to meet all high-end application requirements while enhancing throughput and maximizing return on investment."